IR HEATER UV LAMP

Spiral type

Overview

(General heating, vacuum vessel heating)
Ring heaters, in which the heating tube of a halogen lamp is bent into a circular shape, and spiral heaters, in which the tube is bent into a coiled shape.
Ring heaters are used to heat circular or cylindrical objects, or to heat large disk-shaped objects by arranging ring heaters in concentric circles. (CVD, etc.)

Usage

Cylindrical heating
Wafer heating
Surface heating

Specifications (Special specifications) Ring heater

Shape
Voltage
Wattag
Color
Length
Heating length
■Ring heater
Ring type
100V
500/R68
2,300

φ68
220
Ring type
440V
3,500/R173
2,600
φ173
540
Ring type
440V
3,700/R201
2,600
201
620
Ring type
440V
4,300/R229
2,600
229
720
Ring type
440V
4,800/R257
2,600

257
800
Ring type
440V
5,400/R285
2,600
285
900
Ring type
440V
6,000/R319
2,600
319
1,000
■Spiral heater
Spiral heater
100V
800W/S
2,500
φ45×1.5T
325
Spiral heater
100V
1,500W/S
2,500
φ45×2.5T
465
Spiral heater
200V
1,500W/S
2,500
φ65×4T
780

Specifications (Special specifications) Spiral heater

Shape
Voltage
Wattag
Color
Length
Heating length
Straight pipe parallel
208V
3,000
2,550
255×2
385
Straight pipe parallel
208V
3,190
2,550
2,550×2
365